Entegris, Inc. Hall 8 / C40

Exhibitor Profile

Entegris, Inc. (NASDAQ: ENTG) is a leading supplier of advanced materials and process solutions for the semiconductor, life sciences, and other high-tech industries.

For over 50 years, we have been committed to solving our customers’ most demanding process challenges through a broad solutions portfolio, collaborative and innovative product development, and a focus on science and applications knowledge.

Entegris has ~8,000 employees throughout its throughout its global operations and is ISO 9001 certified. It has manufacturing, customer service, and/or research facilities throughout United States, Canada, China, Germany, Israel, Japan, Malaysia, Singapore, South Korea, Taiwan and the United Kingdom. Our highly skilled team members, facilities and resources are right where you need them in order to help you solve your most advanced technology challenges.

Products / Markets

Product Index

  • Analytische Messtechnik
  • Luftfilter
  • Luftfiltermedien
  • Luftfilterprüfung

Market Scope

  • Biotechnologie/Biopharmazie
  • Filtrations- und Separationsindustrie
  • Halbleiterindustrie

Product Index

  • Air Filter Media
  • Air Filter Testing
  • Air Filters
  • Analytical Instruments

Market Scope

  • Biotechnology/Biopharmac. Industry
  • Filtration and Separation Industry
  • Semiconductor Industry

Product Index

  • 分析仪器
  • 空气过滤器
  • 空气过滤器介质
  • 空气过滤测试

Market Scope

  • 半导体工业
  • 生物技术/生物制药业
  • 过滤与分离工业

Product Index

  • التحاليل
  • تصفية الهواء اختبار
  • فلاتر الهواء
  • مواد فلاتر الهواء

Market Scope

  • صناعات الفلترة وفصل المواد
  • صناعة أنصاف النواقل
  • صناعة التقنية البيولوجية والبيوصيدلية

Product Index

  • Filtres à air
  • Fluides pour filtres à air
  • Instruments analytiques
  • Test de filtre à air

Market Scope

  • Industrie biotechnologie/biopharmaceutique
  • Industrie de filtration et de séparation
  • Industrie des semi-conducteurs

Product Index

  • Filtri aria
  • Mezzi filtranti aria
  • Strumenti analitici
  • Verifica filtro aria

Market Scope

  • Biotecnologie/biofarmaceutica
  • Settore filtrazione e separazione
  • Settore industria dei semiconduttori

Product Index

  • Filtry powietrza
  • Media filtrów powietrza
  • Narzędzia analityczne
  • Testowanie filtrów powietrza

Market Scope

  • Biotechnologia/biofarmaceutyka
  • Filtrowanie i separacja
  • Produkcja półprzewodników

Product Index

  • Filtros de ar
  • Instrumentos analíticos
  • Meios de filtro do ar
  • Teste de Filtro de ar

Market Scope

  • Ind. de biotecnologia/biofarmac.
  • Indústria de filtragem e separação
  • Indústria de semicondutores

Product Index

  • Аналитические инструменты
  • Воздушные фильтры
  • Воздушный фильтр Тестирование
  • Фильтрующий материал

Market Scope

  • Биотехнология / Биофармацевтическая промышленность
  • Отрасль фильтрации и сепарирования
  • Полупроводниковая промышленность

Product Index

  • Filtros de aire
  • Instrumentos analíticos
  • Medios de filtros de aire
  • Prueba del filtro de aire

Market Scope

  • Industria de la biotecnología/biofarmacéutica
  • Industria de la filtración y la separación
  • Industria de los semiconductores

Product Index

  • Analitik Cihazlar
  • Hava Filtreleri
  • Hava Filtresi Ortamı
  • Hava Filtresi Test

Market Scope

  • Biyoteknoloji/Biyoeczacılık Endüstrisi
  • Filtrasyon ve Ayırma Endüstrisi
  • Yarıiletken Endüstrisi

Product Index

  • 공기 여과재
  • 공기 필터
  • 공기 필터 테스트
  • 분석 장치

Market Scope

  • 반도체 산업
  • 생명공학/생물 약제학 산업
  • 여과 및 분리 산업

Product Index

  • エアフィルター
  • エアフィルターメディア
  • エアフィルター試験
  • 分析機器

Market Scope

  • バイオテクノロジー・バイオ医薬品産業
  • 半導体業界
  • 濾過および分離技術工業

What's new

Defining an environment before filtering it: Analytical Services

Effective chemical filtration needs accurate contaminant data. Entegris Analytical Services provides measurement of Airborne Molecular Contamination (AMC) in commercial environments. Contaminants are identified and detected down to parts per trillion (ppt, 10-12) concentration levels, with 99% confidence. Whereas health concerns usually center around ppm level contamination, product and electronics corrosion can happen at much lower concentrations.

Asset archives, data centers, control rooms, hospitals, fuel cells, turbines all need to be protected from gas-phase impact. Qualitative measurement techniques like corrosion strips do not provide sufficient information to formulate optimized filter solutions. Entegris provides filtration solutions that are tailored for the respective application, based on competent environmental analysis.

Visit us in Hall 8 at Booth 40 and several of our technical presentations in the conference.

Conference Presentation/s

See it. Control it. Defining the environment before deploying a filtration solution

J. M. Lobert*, Entegris Inc., USA

Conference Session: - -

Filtration solutions are often deployed without accurately understanding the contamination challenges of the environment to be protected. This is usually done to either implement a solution as quickly as possible, or to minimize cost by using pre-defined and readily available off-the-shelf solutions. However, this approach neither assures an efficient contaminant removal nor does it optimize cost of ownership. An inexpensive filter changed out often may be more expensive than getting a tailored, more expensive solution that lasts much longer.

The approach promoted here is the See it. Control it. paradigm, where “seeing” means measuring the contamination first in order to characterize the environment, and “controlling” means implementing a filter solution that is tailored to that specific environment. Instead of formulating a filter solution that provides equal amounts of adsorbents for different contaminant classes, we suggest adjusting the adsor­­bents such that they match the actual environmental challenge, as determined by accurate measure­ments (Figure).

Contamination control concepts detailed in this paper are specifically for filters removing gas-phase air contami­na­tion and particles, but apply equally to any other type of filtration, such as the purification of liquids, solids or slurries.

To arrive at the best characterization of the environments to be protected, an accurate and specific measurement technique needs to be applied. For gas-phase evaluation, qualitative or semi-quantitative methods are unsuitable to do so (e.g., corrosion strips or micro balances).

To measure actual concentrations as well as contaminant identification, ISO 17025 accredited lab services should be used, which are found competent for specific analyses of spe­cific environments for specified concentration ranges. Such gas-phase contaminant concentrations can range from 100s of parts per million in odor problems to single digit parts per trillion in cleanroom environments as per ISO standard 14644-8. For particle contamination, the ...

Are you getting realistic fab performance data? Chemical filter performance is a function of challenge concentration

R. Srivastava*, F. Belanger, J. M. Lobert, Entegris Inc, USA

Conference Session: - -

AMC filters are the first line of defense in commercial operation cleanliness and a key factor to ensuring high productivity. Activated carbon filters are widely used to remove a variety of low concentration chemical contaminants from commercial operations. It is difficult and unviable to test developmental filters at real-world concentration levels, which is why filter developers or independent labs test them under accelerated conditions. In the absence of standards for filter test concentrations, performance claims can vary widely from vendor to vendor, making it difficult for the end user to compare and understand the capabilities of various filters for fab applications.

In this study we show the impact of testing filters at various concentrations and the understanding of the filter performance consequently and why an evaluation is conducted at specific lower concentrations is more effective.

The HVAC industry often tests filters at concentrations as high as 100 parts per million (ppm, 10‑6). Many AMC filter vendors test filters (or potentially only adsorbent samples) at con­cen­tra­tions between 3 and 100 ppm, the ISO standard 10121-1:2014 suggests a range of 9-90 ppm, all far above real-world applications, which might be as low as a few parts per billion (ppb, 10-9). In other words, those applications are a factor of 1000-100000 below test concentrations. Filters being evaluated at 100 ppm vs. 1 ppm can significantly skew the understanding of the filter performance in terms of lifetime or capacity.

Controlled filter testing for single chemicals at varying concentrations shows the impracticality of performing tests at high concentrations much higher than the actual environmental concentrations. However, there are certain models that can, to a certain extent, predict performances at lower concentrations based on results at higher concentrations. These models, too, are limited, and the accuracy of measurements at single digit ppb levels is questionable.

Filtration solutions are often deployed without accurately knowing the contamination challenges of the environment to be protected. This is usually done to either implement a solution as quickly as possible, or to minimize cost by using pre-defined and readily available off-the-shelf solutions. However, this approach neither assures an efficient contaminant removal nor does it optimize cost of ownership. An inexpensive filter, which is replaced often, may have a higher cost of ownership over time than a customized, more expensive solution that has a greater capacity and longer life. Considering the high cost of the ...

Models need validation: Filter tests as a foundation for a computational model predicting performance of AMC filters

A. Chakraborty*, F. Belanger, P. Cate, R. Srivastava, J. M. Lobert; Entegris, Inc.

Conference Session: - -

INTRODUCTION

A wide variety of process conditions and parameters influence the design of high-performance gas phase contamination control solutions such as filters to remove airborne molecular contamination (AMC). AMC filters play a pivotal role in removing harmful contaminants from air streams in commercial operations, to protect humans, products and processes. Proper filter pleat designs maximize lifetime of the filter and provide lower costs of ownership. However, it is difficult to obtain filter performance experimentally at very low contaminant concentrations due to long test times, high experimental cost and technical limitations.

Virtual prototyping using computational fluid dynamics (CFD) can minimize these limitations. The link between AMC filter performance and a predictive, numerical model is validation through testing. A numerical model is only as good as its verified performance. Physical measurements are essential to provide a sound basis, to which the model can be tuned, before it is able to extrapolate the physical measurements to calculated data.

This study will demonstrate an approach that involves validation and prediction of the removal efficiencies of AMC filters at low contaminant levels required in many industrial applications such as SEMI cleanrooms. The application introduces ...

MATERIALS AND METHODS:

In our test setups, the AMC filter is positioned in a laminar air flow zone inside a wind tunnel. The pollutant test gas is introduced in the upstream airflow. The filter is then challenged with the test gas at controlled concentrations, flow rates & test conditions. The test gas is measured in both upstream and downstream locations to measure the filter performance. Fig. 1a is a sketch of the test set up, Fig. 1b shows the model of a single layer pleated filter.

Activated carbon was chosen as the adsorbent and toluene was chosen as proxy organic contaminant with initial upstream concentration of 1 ppm. A 2D representative transient CFD model was developed with a goal to predict AMC removal at low parts per billion (10-9, ppb) level, as the ability to measure AMC at those test levels is important to understand behavior in ...

RESULTS & VALIDATION

An unsteady 2D CFD pleated filter model was developed by ANSYS Fluent for a specific air flow rate with toluene as the contaminant. The flow was laminar and the model was based on gas adsorption processes in a porous adsorbent bed. Modeling pressure compared well with experimental values. Moreover, the flow profile offered spatial and temporal resolution of the flow which is critical in assessing local flow uniformity profiles of filter systems. The models were able to predict and validate filter adsorption capacity. Figures 2 captured the transient contaminant mass fraction progress at three different time stamps (5, 111 and 236 hours), respectively. Red and blue indicate the saturated and unused parts of the media...

CONCLUSIONS

The design of high-performance gas filtration and purification products critically rely on the sensitivity of adsorption performance to a variety of process parameters, which are often difficult to know in advance of product design. Due to the constraints of conducting experiments, a CFD methodology was developed to predict adsorption behavior and filter capacity of specific AMC pleated filters. Results indicated that ...

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