Neon (Ne) is an essential noble gas used in semiconductor and display manufacturing processes, particularly as a laser source in photolithography and laser-based annealing applications. Due to its extremely low abundance in the atmosphere and chemical inertness, neon is obtained exclusively through air separation processes and requires additional purification before reuse. Recent supply chain disruptions have further underscored the need for efficient, practical neon purification and recycling technologies. Recovered neon typically contains impurity gases such as argon (Ar) and oxygen (O₂), which must be selectively removed to ensure stable process performance. Conventional cryogenic purification methods are energy-intensive and rely on large-scale infrastructure, which motivates the development of alternative, low-energy separation technologies.

In this study, a filter-based direct purification approach using a microporous metal-organic framework (MOF) (size 5-8 Å) was investigated for the selective removal of impurities from neon-containing gas streams. Breakthrough experiments were conducted using a packed column filled with a microporous MOF under continuous gas flow conditions. The outlet gas composition was monitored in real time using a quadrupole mass spectrometer to evaluate the dynamic adsorption behavior of individual gas components. The results demonstrate that [...] selectively adsorbs argon and trace oxygen, while neon exhibits negligible adsorption and passes through the column without delay.

These findings indicate that a [...] enables indirect neon purification by selectively removing impurity gases rather than directly capturing neon. The MOF-based filter system presented in this work offers a promising, low-energy, and scalable solution for noble gas purification and recycling, with potential applications in semiconductor and display manufacturing.